NANOS EBSD — High-resolution tabletop SEM with integrated EBSD capability

Combine high-resolution SEM imaging with EBSD analysis in a compact, easy-to-use tabletop platform. By analyzing diffraction patterns, it can accurately measure microstructural information such as crystal orientation, phase, and grain structure, while also enabling integrated elemental and crystallographic analysis in combination with EDS.

< 8 nm

Resolution

70°

Eucentric tilt

EBSD + EDS

Embedded

Eucentric tilt: the key to seamless EBSD

The combination of eucentric tilt and EBSD creates a seamless workflow between imaging and crystallographic analysis. You can image the sample at both 0° and the 70° EBSD position simply by tilting the stage, without breaking vacuum or repositioning the sample. Thanks to the eucentric tilt, the field of view, working distance and focus are maintained during tilting, so an area identified during imaging can be brought directly into the EBSD position without losing the region of interest. This makes switching between imaging and EBSD fast, intuitive and highly reproducible.

Key Features

Integrated EBSD functionality designed to make crystallographic analysis fast, intuitive and accessible on a tabletop SEM.

Eucentric Tilt up to 70°

Keep your region of interest centered and in focus while tilting.

Crystallographic Analysis in Tabletop SEM

Access crystal orientation and structure information directly on a tabletop SEM.

Fast & Reliable Orientation Mapping

Rapidly map crystal orientations across the sample.

Phase Identification Capability

Identify and distinguish different crystalline phases.

Compact & Integrated Design

Fully integrated EBSD functionality in a compact setup.

Combined EDS & EBSD Platform

Easily switch between EDS and EBSD analysis in the same system.

Bruker e-Flash XS EBSD

Compact EBSD detection technology designed for reliable crystallographic analysis and high-speed orientation mapping.

Bruker e-Flash XS EBSD detector

Bruker e-Flash XS

CMOS-based EBSD detector with high-speed pattern acquisition, user-replaceable phosphor screen and simple USB 3.0 connectivity.

View Bruker e-Flash XS
EBSD SPECIFICATIONS
Detector technology
CMOS imaging chip technology
Native image resolution
720 x 540 pixels
Binning modes
2x2, 3x3, 4x4, 5x5, 6x6
Speed
Up to 520 frames/second (fps) in all binning modes
Optics
Custom-made optics system with field lens for maximizing light efficiency
Phosphor screen
User-replaceable phosphor screen
Connection
True plug-and-play (PnP) device – data and power transfer via USB 3.0 cable
Dimensions
Length ~84 mm (3.31 in), diameter ~48 mm (1.89 in)
Weight
0.85 kg
Scan generator
QUANTAX Scan system (external scan generator)

BROCHURE

Learn more about our EBSD solution.

Download the brochure

Ready to experience the NANOS EBSD?

Contact us for a personalized demonstration.