ONYX — The largest-stage tabletop SEM.
Built for more.
ONYX tabletop SEM combines the largest stage in its class with outstanding resolution, enabling detailed imaging of more and larger samples without compromising performance.
< 8 nm
Resolution
220mm
Sample chamber
EDS
Embedded
Built for Large Sample Capacity
The large interchangeable stub plate gives you the flexibility to load more samples, larger samples, or configure the chamber to match your workflow.
220 × 220 mm
Chamber size
Up to 50 mm
Max sample height
110 × 110 mm
XY travel
Load up to 16 × 1 inch stubs
Handle high sample throughput with room for up to sixteen 1 inch stubs on a single stub plate.
Load up to 64 × half inch stubs
Maximize capacity with a dense configuration that fits up to sixty-four half inch stubs.
Load large samples
The spacious chamber and large stub plate make it easy to work with larger or more complex samples.
Interchangeable stub plate
Swap stub plates easily to adapt the system for different sample types, capacities and applications.
Compact, Robust & Versatile Desktop SEM
ONYX is a robust tabletop SEM designed using the latest technology to deliver fast, high-quality imaging and elemental analysis. Its compact design and largest stage in its class make it ideal for a wide range of applications, including R&D, industrial and research & education. The ONYX provides immediate access to SEM capabilities, making it perfect for users looking to reduce reliance on external SEM services or larger floor-model instruments. With a small footprint, excellent system stability and no need for dedicated infrastructure, the ONYX fits seamlessly into any lab environment.
Product Features
Comprehensive capabilities designed for demanding analytical workflows
High-Performance SE & BSE Detectors
The ONYX tabletop SEM is equipped with a Secondary Electron Detector (SED) for high-resolution surface topography imaging, and a high-quality 4-quadrant Backscattered Electron Detector (BSD) for compositional contrast. The BSD quadrant design enables advanced imaging modes including topographical shading, providing valuable insights into surface roughness and material properties. Mixed-mode imaging allows simultaneous SE and BSE signals to be overlaid or displayed side-by-side for comprehensive sample analysis.
Learn moreIntegrated EDS Analysis
The ONYX includes an embedded Silicon Drift Detector (SDD) for Energy Dispersive Spectroscopy (EDS). With an active area of 30 mm² and an energy resolution of <129 eV at Mn Kα, the detector supports point analysis, line scans and full element mapping — all integrated into the system without the need for external hardware.
Learn moreLow Vacuum Mode
The ONYX operates in both high- and low-vacuum modes. In low-vacuum mode (40 Pascal), charging effects on non-conductive samples are reduced or eliminated, often removing the need for sputter coating. Switching between modes requires a single click in the software interface.
Learn moreLargest Stage in Tabletop SEM
ONYX features the largest stage in the tabletop SEM market, providing significantly more space and flexibility for large samples and high-throughput workflows. With 110 × 110 mm XY travel and support for up to 16 × 1 inch or 64 × half inch stubs, ONYX brings large-stage capability to a compact tabletop system.
Learn moreUser-Replaceable Source
The thermionic tungsten filament delivers 1,000+ operating hours in ECO-mode. When replacement is needed, users can swap the source themselves using a simple alignment tool — no service visit, no specialist required. This minimizes downtime and reduces cost of ownership compared to systems requiring external servicing.
Learn moreDiscover Suite
The Semplor Discover Suite provides an intuitive software environment for SEM imaging and EDS analysis, requiring minimal training. Users with varying levels of SEM experience can achieve high-quality results quickly. The system is delivered pre-configured on a 27" All-in-One PC with all software pre-installed.
Watch overviewOptical Navigation Camera
Upon sample insertion, the ONYX displays a full-field color optical image of the sample surface. This enables rapid identification of areas of interest before switching to electron imaging — a practical feature for efficient, high-throughput workflows.
1–20 kV Accelerating Voltage
Adjustable acceleration voltages from 1 to 20 kV provide flexibility across a wide range of sample types and analytical requirements. Lower voltages are suited to beam-sensitive samples; higher voltages improve EDS signal yield and mapping efficiency.
Clean Vacuum Chamber
The ONYX contains no moving mechanical parts inside the vacuum chamber — a unique design feature. This eliminates the risk of contamination and mechanical failure, reduces maintenance requirements, and ensures consistent imaging performance over time.
Learn moreAnalytical Software
The NANOS is available with two optional software modules, fully embedded in the Discover interface.
Discover EDS
Unlock the full analytical potential of the NANOS with Semplor's Discover EDS software. From live elemental mapping to precise peak identification and quantification, Discover EDS streamlines every step of the analytical workflow.
- Live spectrum display
- Instant element identification and quantification
- Advanced map blending, line scan analysis
- One-click reporting
Explore Apps — Particles, Fibers & 3D
The Semplor Explore App transforms standard SEM imaging into advanced material characterization. Three optional modules are available:
Explore Particles
Automated detection, segmentation and measurement of particles, pores and grains, including touching particles. Outputs include size distributions, shape descriptors and exportable statistical reports.
Explore Fibers
Diameter, orientation and curvature measurement for fiber analysis. Designed for textiles, nonwovens, electrospun materials and fiber-based samples.
Explore 3D
3D reconstruction and quantitative height maps from SEM images, using stereo pair reconstruction, 4-quadrant BSD topography, or single-image rendering.
Applications
The NANOS tabletop SEM is used across a wide range of research, industrial and environmental applications. Each application combines high-resolution SEM imaging with elemental analysis (EDS) and optional advanced software modules.
Asbestos & Fiber Analysis
Fiber identification and elemental characterization for regulatory compliance
Read more
Materials Characterization
Surface morphology, compositional contrast, elemental distribution in metals, ceramics, polymers and composites
Read more
Particle Analysis
Automated detection, sizing and classification of particles, pores and inclusions
Read more
Failure Analysis
Surface defect investigation, fracture analysis and contamination identification
Read more
Forensic Investigation
Material identification, trace element analysis and fiber evidence characterization
Read more
Coating & Surface Analysis
Coating thickness, adhesion and elemental composition in automotive, aerospace and industrial coatings
Read moreImages captured with ONYX
Explore stunning high-resolution images captured with the ONYX tabletop SEM.
Technical Specifications
IMAGING MODE |
Optical |
0.7 & 2.5x with up to 12.5x |
SEM |
Magnification range: 100 - 200.000x |
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Resolution |
<8 nm |
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Capture resolution |
Up to 4096 x 4096 pixels (4K) |
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ILLUMINATION |
Light optical |
Bright field |
Electron optical |
Optimized thermionic source (tungsten) |
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Lifetime: 1000+ operating hours in ECO-mode |
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Acceleration voltages |
Default: 1, 2, 5, 7, 10, 15 & 20 kV |
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DETECTORS |
Secondary electron detector (SED) |
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Backscattered electron detector (BSD) – 4 quadrant |
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Energy Dispersive Spectroscopy detector (EDS) – embedded |
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LIGHT OPTICAL NAVIGATION CAMERA |
Full-color |
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IMAGE FORMATS |
JPEG, TIFF, PNG, BMP |
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USER INTERFACE |
Communication, imaging and analysis use a single monitor with control via a wireless mouse & keyboard |
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Remote control and diagnostic enabled |
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Network, USB, workstation |
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SAMPLE STAGE |
Computer-controlled motorized X Y travel: 110 x 110 mm |
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Up to 50 mm height |
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Up to 16x 1" stubs or 64x 1/2" stubs Electrical and fluid feedthrough |
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VACUUM CHAMBER |
220 x 220 mm |
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EDS SPECIFICATIONS |
Detector type |
Silicon Drift Detector (SDD), thermo-electrically cooled |
Detector active area |
30 mm² |
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Energy resolution |
@ Mn Kα < 129 eV |
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Max. input count rate Take-off Angle |
300,000 cps 30° |
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Hardware integration |
Fully embedded SDD, pulse processor and scan generator |
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SOFTWARE |
Installed on Windows PC and controlled via user interface |
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EDS point analysis, line analysis and mapping |
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Reporting & export functions |
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SYSTEM SPECIFICATIONS |
Footprint |
420 (w) x 605 (d) x 625 (h) mm |
Weight |
95 kg |
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Pumps |
Pfeiffer Turbo molecular pump Pfeiffer oil free membrane pre-vacuum pump |
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Vacuum modes |
High vacuum SEM mode (standard)
Low vacuum mode (standard): vacuum of 40 Pascal for reduced charging |
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Motor controlled vacuum levels via the user interface. |
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Workstation |
Pre-configured PC with a 27” monitor.
SEM imaging and EDS analysis software installed. |
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AMBIENT CONDITIONS |
Temperature |
15°C - 25°C (59°F - 77°F) |
Humidity Geological height |
20 - 80% RH Up to 2000 meters |
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Power |
System in typical power imaging mode: 110 W (max. 140 W) |
SEMPLOR
Featured Resources
Explore our curated collection of technical resources, application notes, and educational content.
Frequently Asked Questions
No. The ONYX is designed for use in a standard laboratory environment and does not require a cleanroom, dedicated vibration isolation or specialist infrastructure. Despite offering the largest stage in the tabletop SEM market, ONYX retains the accessibility and ease of installation of a tabletop SEM.
ONYX brings large-stage SEM capability into a tabletop system. With the largest stage in the tabletop SEM market, 110 × 110 mm XY travel and significantly more sample capacity than conventional tabletop systems, ONYX bridges the gap between compact tabletop SEMs and larger floor-standing instruments. It combines large-sample flexibility, powerful imaging and analytical capabilities with the accessibility, lower infrastructure requirements and lower total cost of ownership of a tabletop SEM.
The ONYX uses a thermionic tungsten filament. In ECO-mode, the source provides 1,000+ operating hours and can be replaced by the user in minutes without a service visit. CeB₆ sources offer longer lifetime and higher brightness, while tungsten provides a lower cost of ownership, strong analytical beam current and straightforward user maintenance.
No. The Discover Suite is designed for users with varying levels of SEM experience. Its intuitive workflow makes navigation, imaging and analysis straightforward, allowing new users to achieve high-quality results quickly while still providing the capabilities required by experienced SEM users.
Minimal preparation is required for most samples. Non-conductive samples can be imaged in low-vacuum mode at 40 Pascal to reduce or eliminate charging effects, often removing the need for sputter coating. Standard SEM preparation methods can be used for high-vacuum imaging.
ONYX is built specifically for applications requiring more sample space. It features the largest stage in the tabletop SEM market, a spacious 220 × 220 mm chamber and 110 × 110 mm XY travel. The interchangeable stub plate can accommodate up to 16 × 1 inch stubs or up to 64 × half inch stubs, while larger individual samples can also be mounted directly onto the stage.
Yes. ONYX can be equipped with an integrated Silicon Drift Detector (SDD) for Energy Dispersive Spectroscopy (EDS), enabling elemental point analysis, line scans and full elemental mapping alongside SEM imaging. Contact us to discuss the configuration that best suits your application.
Request a Demo or Quote
The NANOS is available through our global distributor network. Contact us to discuss your application, request a live demonstration, or receive a quote for your preferred configuration.





