Technology

The NANOS technology

The NANOS is a comprehensive and affordable tabletop scanning electron microscope (SEM). It is engineered using the latest technology, giving fast and high quality SEM images and elemental analysis. Its design is robust and modern, which makes it perfect for research & development, educational and industrial usage.

Eucentric stage

Easily replacable electron source

SED

Standard included with the NANOS. 

BSD

Standard included with the NANOS. 

EDS

Optionally included in the NANOS, fully embedded.

Click to learn more about EDS.

High performance detectors

The NANOS comes with both a Secondary Electron Detector (SED) and a Back Scattered Electron Detector (BSD) as standard. The high-quality BSD is a 4-quadrant detector providing high resolution images that convey elemental contrast information. The SED collects electrons emitted from the sample surface and thus provides crisp and high-resolution surface-sensitive imaging. Images generated with the SED convey surface topographical information and generally have higher resolution as a result of the smaller beam sample interaction volume. An Energy Dispersive Spectroscopy (EDS) Silicon Drift Detector (SDD) is installed for Elemental Analysis.

Low-vacuum mode reduces sample charching

Specimens can be observed in high vacuum or in low vacuum. The low-vacuum is used to reduce or eliminate the effects of sample charging. When a non-conductive sample is observed under a high-vacuum state, electrons accumulate on the sample surface causing a charging phenomenon. The NANOS is equipped with low-vacuum mode to overcome this. Switching from high to low vacuum can be done by just a click of the mouse.

Eucentric stage standard included

The Eucentric Stage of the NANOS is truly the only one of its kind. It comes standard with the NANOS. The motorized XY movements can easily be controlled by a click of the mouse. Tilting the specimen while in SEM mode can be done by manually turning the stage. Thanks to the eucentric design, the sample stays in focus without the need for intermediate changes in SEM settings. On the monitor the exact tilt angle is indicated. Samples can be tilted up to angles of 55 degrees.

Eucentric stage

BSE
SE

Mixed mode BSE & SE images

BSE and SE images can be simultaneously viewed in a single composite image. Images can either be overlaid or compared side by side.

BSE
SE

Topographical mode

The NANOS high-quality BSE detector is a 4-quadrant detector with fully controllable independent segments. The standard BSE mode provides compositional details from the sample. By utilizing the segments in different combinations, topographical images with a ‘shading effect’ are generated, highlighting the surface from multiple directions. This provides a qualitative visualization of surface roughness.

Embedded elemental analysis

The NANOS is equipped with an integrated EDS detector. The SEM column was designed to have the same optimal working distance for both EDS analysis and high-resolution imaging. This makes the workflow efficient and fast. The operator can select EDS Point Analysis, Line Scan or activate Elemental Mapping. The embedded EDS makes it independent from any third-party equipment and runs on the same PC. The NANOS is also available without EDS.

Default presets:

Accelerating voltages

Adjustable accelerating voltages between 1kV to 20kV ensures high speed EDS analysis and mapping for identifying elements in your samples. Low voltages helps to protect any beam sensitive specimen.

Easily replaceable electron source

The thermionic electron source in the NANOS is a tungsten filament controlled by electro-magnetic coil lenses & electrostatic deflectors. Using the optional ‘eco’-setting, the filament lifetime can be extended up to hundreds of hours and still generate high-resolution images. Any user can replace the electron source with a simple alignment tool, ensuring minimum downtime. No need to wait for a service engineer to replace an expensive source.

Low maintenance

The NANOS has been developed with service at the core of its design. With its easy plug-and-play setup, installation is fast and uncomplicated. Easily removable panels, modular components, a single control board and few moving parts keep service requirements to a minimum. Much can be undertaken by the user. Unique for the NANOS is that there are no moving parts within the vacuum chamber. Due to this smart design the risk of contamination has been eliminated.

Specifications

IMAGING MODE
Optical
2 & 12x optical
Up to 60x digital zoom
SEM
Magnification range: 100 - 200.000x
Resolution
<8 nm
ILLUMINATION
Light optical
Bright field
Electron optical
Optimized thermionic source (tungsten)
Lifetime: 400+ operating hours in ECO-mode
Acceleration voltages
Default: 1, 2, 5, 7, 10, 15 & 20 kV
DETECTOR
Secondary electron detector (SED)
Backscattered electron detector (BSD) – 4 quadrant
Energy Dispersive Spectroscopy detector (EDS) – embedded
LIGHT OPTICAL NAVIGATION CAMERA
Color
IMAGE FORMATS
JPEG, TIFF, PNG, BMP
USER INTERFACE
Communication, imaging and analysis use a single monitor with control via a wireless mouse & keyboard
Remote control and diagnostic enabled
DATA STORAGE
Network, USB, workstation
SAMPLE STAGE
Eucentric tilt stage (+15° up to -40° ) manual
Computer-controlled motorized X, Y: 25 x 25 mm
SAMPLE SIZE
Up to 45 mm diameter (max +15° to -15° tilt)
Up to 14 mm height (optional 22 and 40 mm)
EDS SPECIFICATIONS
Detector type
Silicon Drift Detector (SDD), thermo-electrically cooled
Detector active area
30 mm2
Energy resolution
@ Mn Kα < 132 eV
Max. input count rate
300,000 cps
Hardware integration
Fully embedded SDD, pulse processor and scan generator
SOFTWARE
Installed on Windows PC and controlled via user interface
EDS point analysis, line analysis and mapping
Export functions
SYSTEM SPECIFICATIONS
Footprint
280 (w) x 470 (d) x 550 (h) mm
Weight
62 kg
Pumps
Pfeiffer Turbo molecular pump and an oil free membrane pre-vacuum pump
Vacuum modes
High vacuum SEM mode (standard) Low vacuum mode (standard): vacuum of 40 Pascal for reduced charging
Motor controlled vacuum levels via the User Interface
Workstation
Preconfigured All-in-One PC with a 27” monitor. SEM imaging and EDS Analysis software installed
AMBIENT CONDITIONS
Temperature
15°C - 25°C (59°F - 77°F)
Humidity
20 -  80% RH
Power
System typically in imaging mode: 110 W (max. 140 W)