Technology
The NANOS technology
The NANOS is a comprehensive and affordable tabletop scanning electron microscope (SEM). It is engineered using the latest technology, giving fast and high quality SEM images and elemental analysis. Its design is robust and modern, which makes it perfect for research & development, educational and industrial usage.
High performance detectors
The NANOS comes with both a Secondary Electron Detector (SED) and a Back Scattered Electron Detector (BSD) as standard. The high-quality BSD is a 4-quadrant detector providing high resolution images that convey elemental contrast information. The SED collects electrons emitted from the sample surface and thus provides crisp and high-resolution surface-sensitive imaging. Images generated with the SED convey surface topographical information and generally have higher resolution as a result of the smaller beam sample interaction volume. An Energy Dispersive Spectroscopy (EDS) Silicon Drift Detector (SDD) is installed for Elemental Analysis.
Low-vacuum mode reduces sample charching
Specimens can be observed in high vacuum or in low vacuum. The low-vacuum is used to reduce or eliminate the effects of sample charging. When a non-conductive sample is observed under a high-vacuum state, electrons accumulate on the sample surface causing a charging phenomenon. The NANOS is equipped with low-vacuum mode to overcome this. Switching from high to low vacuum can be done by just a click of the mouse.
0.4 mbar
10⁻⁴ mbar
Eucentric stage standard included
The Eucentric Stage of the NANOS is truly the only one of its kind. It comes standard with the NANOS. The motorized XY movements can easily be controlled by a click of the mouse. Tilting the specimen while in SEM mode can be done by manually turning the stage. Thanks to the eucentric design, the sample stays in focus without the need for intermediate changes in SEM settings. On the monitor the exact tilt angle is indicated. Samples can be tilted up to angles of 55 degrees.
Eucentric stage
Mixed mode BSE & SE images
BSE and SE images can be simultaneously viewed in a single composite image. Images can either be overlaid or compared side by side.
Topographical mode
The NANOS high-quality BSE detector is a 4-quadrant detector with fully controllable independent segments. The standard BSE mode provides compositional details from the sample. By utilizing the segments in different combinations, topographical images with a ‘shading effect’ are generated, highlighting the surface from multiple directions. This provides a qualitative visualization of surface roughness.
Embedded elemental analysis
The NANOS is equipped with an integrated EDS detector. The SEM column was designed to have the same optimal working distance for both EDS analysis and high-resolution imaging. This makes the workflow efficient and fast. The operator can select EDS Point Analysis, Line Scan or activate Elemental Mapping. The embedded EDS makes it independent from any third-party equipment and runs on the same PC. The NANOS is also available without EDS.
Default presets:
Accelerating voltages
Adjustable accelerating voltages between 1kV to 20kV ensures high speed EDS analysis and mapping for identifying elements in your samples. Low voltages helps to protect any beam sensitive specimen.
Easily replaceable electron source
The thermionic electron source in the NANOS is a tungsten filament controlled by electro-magnetic coil lenses & electrostatic deflectors. Using the optional ‘eco’-setting, the filament lifetime can be extended up to hundreds of hours and still generate high-resolution images. Any user can replace the electron source with a simple alignment tool, ensuring minimum downtime. No need to wait for a service engineer to replace an expensive source.
400+ hours filament lifetime
200-400 hours filament lifetime
Up to 100 hours filament lifetime
Low maintenance
The NANOS has been developed with service at the core of its design. With its easy plug-and-play setup, installation is fast and uncomplicated. Easily removable panels, modular components, a single control board and few moving parts keep service requirements to a minimum. Much can be undertaken by the user. Unique for the NANOS is that there are no moving parts within the vacuum chamber. Due to this smart design the risk of contamination has been eliminated.
Specifications
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IMAGING MODE
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Optical
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2 & 12x optical
Up to 60x digital zoom |
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SEM
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Magnification range: 100 - 200.000x
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Resolution
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<8 nm
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ILLUMINATION
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Light optical
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Bright field
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Electron optical
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Optimized thermionic source (tungsten)
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Lifetime: 400+ operating hours in ECO-mode
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Acceleration voltages
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Default: 1, 2, 5, 7, 10, 15 & 20 kV
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DETECTOR
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Secondary electron detector (SED)
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Backscattered electron detector (BSD) – 4 quadrant
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Energy Dispersive Spectroscopy detector (EDS) – embedded
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LIGHT OPTICAL NAVIGATION CAMERA
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Color
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IMAGE FORMATS
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JPEG, TIFF, PNG, BMP
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USER INTERFACE
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Communication, imaging and analysis use a single monitor with control via a wireless mouse & keyboard
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Remote control and diagnostic enabled
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DATA STORAGE
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Network, USB, workstation
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SAMPLE STAGE
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Eucentric tilt stage (+15° up to -40° ) manual
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Computer-controlled motorized X, Y: 25 x 25 mm
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SAMPLE SIZE
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Up to 45 mm diameter (max +15° to -15° tilt)
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Up to 14 mm height (optional 22 and 40 mm)
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EDS SPECIFICATIONS
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Detector type
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Silicon Drift Detector (SDD), thermo-electrically cooled
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Detector active area
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30 mm2
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Energy resolution
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@ Mn Kα < 132 eV
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Max. input count rate
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300,000 cps
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Hardware integration
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Fully embedded SDD, pulse processor and scan generator
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SOFTWARE
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Installed on Windows PC and controlled via user interface
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EDS point analysis, line analysis and mapping
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Export functions
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SYSTEM SPECIFICATIONS
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Footprint
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280 (w) x 470 (d) x 550 (h) mm
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Weight
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62 kg
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Pumps
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Pfeiffer Turbo molecular pump and an oil free membrane pre-vacuum pump
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Vacuum modes
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High vacuum SEM mode (standard)
Low vacuum mode (standard): vacuum of 40 Pascal for reduced charging
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Motor controlled vacuum levels via the User Interface
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Workstation
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Preconfigured All-in-One PC with a 27” monitor.
SEM imaging and EDS Analysis software installed
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AMBIENT CONDITIONS
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Temperature
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15°C - 25°C (59°F - 77°F)
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Humidity
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20 - 80% RH
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Power
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System typically in imaging mode: 110 W (max. 140 W)
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